MRes 2000M Manual Contactless Resistivity Measurement System

Tailored for scenarios where automatic mapping is not necessary

EXCELLENCE

The Cogent Manual System

MRes 2000M Manual Contactless Resistivity Measurement System 300 mm

MRes 2000M Manual Contactless Resistivity Measurement System
[300 mm]

Introducing the MRes2000M, a manual iteration of our renowned non-contact resistivity measurement system tailored for scenarios where automatic mapping is not necessary.

The MRes2000M empowers users to position samples with precision within the sensor region using a linear transfer line, while upholding the unmatched accuracy and reliability synonymous with the MRes2000 series.

The versatile solution

Designed to accommodate wafer diameters ranging from 100 mm to 300 mm and thicknesses spanning 150 µm up to 1,200 µm, the MRes 2000M stands as a versatile solution. Its adaptability makes it indispensable for a diverse range of applications, particularly in research and development across industries and academia.

Measuring Data

Wafer size:

100 mm to 300 mm

Wafer thickness:

150 µm up to 1,200 µm

Resistance range:

 0.005 Ω/sq to 100 kΩ/sq

Std. Dev. (1𝜎):

<< 1 % for < 5,000 Ω/sq
<< 0.1 % for < 500 Ω/sq

PN-type Sensor:

Available

 

The manually controlled MRes2000M features a standard resistance range of 0.005 Ω/sq up to 100 kΩ/sq, ensuring precise measurements for bulk samples and conductive layers on one side of the wafer.

No Recalibration Needed for any Thickness

Its standout feature lies in its ability to maintain accuracy without requiring recalibration across the entire dynamic range, encompassing both thickness and resistivity variations. With a standard deviation (1𝜎) of less than one percent, consistency is guaranteed in every measurement.

Tailoring measurement results to perfection is made possible through custom-made recipes, covering a spectrum of basic sample properties such as substrate properties and potential film resistivity, especially crucial for semiconductor applications The MRes2000 offers unparalleled flexibility, allowing precise measurement of resistance, resistivity, and thickness across the complete dynamic range without the need for time consuming recalibration.

Seeking an automatic wafer positioning system? Explore our range of other products For any questions or specific requirements, feel free to reach out.

At SWS-Tec, we are committed to advancing your measurement needs with cutting-edge technology.

MRes2000M Manually Measured Mapping Result

MRes2000M Manually Measured Mapping Result: The MRes2000M system provides manually measured mapping results, exemplified here for a Ø 100 mm Silicon wafer. Eleven distinct measurement points across the wafer are selected for measuring both thickness and resistance, allowing for the quantification of wafer quality.

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