MRes 2000 [300 mm] Software

Flexible Export Options for Enhanced Accessibility

Choose from automatic or manual export options for your data reports. Generate ASCII result reports containing comprehensive data sets effortlessly. Plus, with just one click, download 2D plots of your data and automatically generated result reports in PDF format for instant accessibility.

Customizable Display of Physical Properties

Tailor your data visualization to your specific needs by choosing which physical properties to display. Whether you’re measuring semiconductor wafer properties or thin conductive films, our software puts you in control.

Individual Color Themes

Customize your visualization experience with personalized color themes, reducing eye strain and enhancing visibility to suit your preferences.

Visualizing Semiconductor Measurement Results

The MRes 2000 Control Software displays measurement outcomes from a 49-point mapping plan, specifically applied to a Ø 300 mm Silicon wafer. Users can seamlessly switch between physical quantities like Thickness (dark image), Resistance, and Resistivity (bright image) as well as toggle between raw and corrected values, adhering to the American Society for Testing and Materials ( ASTM) standards. The results are presented through a color-coded data plot, a histogram for easy data-value distribution visualization, and a statistics table.
Users can also choose between different themes, such as dark and bright modes.

Data table

MRes 2000 Control Software displaying measurement results from a 49-point mapping plan for a 300 mm diameter silicon wafer. In addition to the graphical data representation shown in the figure above, all physical quantities are also available in a data table.

Result report

MRes 2000 Control Software export functions: The software supports automatically generated result reports in PDF format for comprehensive documentation. Data can also be exported in ASCII and Excel formats for flexible analysis and seamless integration with existing data management systems. Additionally, users can download static images of color coded data plots for a quick overview of experimental results.

Mapping plan

MRes 2000 Control Software displaying measurement results from a custom mapping plan shaped like an Ω, exemplified here for a Ø 100 mm Silicon wafer.
Custom recipes, including mapping plans, are stored in a database for easy selection.

MRes DataViz Software

Introducing Our MRes Data Analysis and Visualization Software

MRes 2000 Software 200 mm: Unlock the full potential of your high precision data with our innovative software tailored for the semiconductor industry. Beyond just measuring, our software empowers you to delve deep into your data, providing insights that drive breakthroughs in research and development.
Here’s what sets our software apart:

1. 2D and 3D Data Analysis: Gain comprehensive insights into your data with advanced analysis capabilities that extend into both two and three dimensions.
2. 3D Data Point Interpolation: Seamlessly fill in the gaps in your data with precision through our sophisticated interpolation algorithms, ensuring a complete and accurate picture.
3. Direct Comparison of Different Physical Properties: Easily compare various physical properties of the same wafer, such as resistivity and thickness, enabling you to identify correlations and optimize performance.
4. Simultaneous Comparison of Same Physical Properties Across up to Four Wafers: Effortlessly compare the same physical property, such as resistivity, across up to four different wafers simultaneously. Gain deeper insights into material consistency and performance variation with ease.
5. Cross Sectional Analysis at Arbitrary Angles: Explore your specimens from any angle with our flexible cross sectional analysis tools, providing a  deeper understanding of their internal structures.
6. Data Access via SQL Database: Effortlessly manage and retrieve your data with the power of SQL database integration, ensuring efficient workflows and seamless access to information.
7. One Click Export of Result Reports: Streamline your reporting process with our intuitive one click export feature, giving you the opportunity of generating both PDF reports and static or dynamic figures with ease.
8. Individual Color Themes: Customize your visualization experience with personalized color themes, reducing eye strain and enhancing visibility to suit your preferences.

MRes 2000 Software 200 mm

At the forefront of innovation, our software is designed to empower semiconductor researchers and developers like you to unlock new insights, accelerate discoveries, and drive progress in the industry.

MRes DataViz (Spec. resistivity N-type + Sample thickness)

MRes Data Analysis and Visualization Software presenting a direct comparison between different physical quantities for the same specimen, as exemplified here for a Ø 300 mm Silicon wafer. The 3-dimensional views across multiple graphs can be synchronized, allowing for comfortable analysis of dependencies between different physical quantities, such as Resistivity and Thickness.
We utilized 49 distinct measurement points across the wafer for Thickness and Resistance, enabling the calculation of 3-dimensional interpolated data. Users can also choose between different themes, such as dark and bright modes.

MRes DataViz 2d-Mapping

MRes Data Analysis and Visualization Software (bright mode) presents a 2-dimensional view of the same data as shown in the figure above. The 49 distinct measurement points across the wafer, used for calculating the interpolated data, are exemplarily displayed for the thickness in the right graph.

3-dimensional Cross Section Analysis

The MRes Data Analysis and Visualization Software provides a powerful tool for analyzing 3-dimensional cross sections. Users can explore physical quantities, including Thickness, Resistivity, and Resistance, by examining an interpolated cross-section area highlighted by a grey shaded plane in the left image. The cross-sectional data is conveniently displayed in a separate graph to the right of the 3d-visualization. Users have the flexibility to rotate the cross-section by 360° for a comprehensive view. The software leverages 49 distinct measurement points distributed across the wafer, ensuring precise calculation of the interpolated data. Notably, the data showcased in this figure was acquired from a Ø 300 mm Silicon wafer.

MRes DataViz: One click image download.

One click image download from our MRes Data Analysis and Visualization Software for a 3-dimensional cross-section analysis and the corresponding 2-dimensional mapping points, shown in the left and right figure, respectively. All physical quantities such as Thickness and Resistivity can be analyzed with the assistance of an interpolated cross-section area, indicated by the grey shaded plane in the 3d-image. The cross-sectional data is presented in a separate graph to the right of the 3-dimensional data, whereas the cross-section can be rotated by 360°.
Utilizing 49 distinct measurement points distributed across the wafer, as shown in the right image, allows for precise calculation of the interpolated data. The data showcased in this figure was acquired from a Ø 300 mm Silicon wafer.

Comparison between up to four different datasets within our MRes Data Analysis and Visualization Software in both, 3-dimensional (figure A) or 2-dimensional (figure B) presentation. Simply choose between the same physical quantity for different wafers (presented in this figure), different physical quantities for the same wafer (not shown within this figure) or a mixture of both.
We utilized 49 distinct measurement points across the wafer for Thickness and Resistance, enabling the calculation of 3-dimensional interpolated data. The data showcased in these figures was acquired from four different Silicon wafers.